3D Optical Profiler  PDF Download

3D Optical Profiler
 
Nano level 3D profile quickly presents
Carmar’s SWIM-1510MS designs with the latest scanning white-light interferometry technology. Outstanding performance with simple operation, customer design flexibility, high-precision scanning and graphic obtaining. 3D profile and surface texture analysis can can be done by Non contact, none constructive and general Atmospheric Environment. Moreover, Nano level surface roughness of ball and step height analysis tracing the ISO International standardization. 

Powerful SWIM series Whitelight Interferometer can acquire the scanning data of FOV in a few seconds. 3D profile and height inspection results obtaining is better than point to point con-focal microscope. 3D graphic measuring ability is better than stereo 2D scanning microscope.

No matter the polishing, rough layer, or even the transparent material can be inspected by SWIM as long as the reflection rate of measuring object is over 1%. SWIM is suitable for the inspections of surface profiles and micro all kinds of materials, MEMS components. The applications are as below:
           Glass lens
           Coating surface
           Semiconductor Wafers
           Data Storage Surface (HDD, DVD, CD)
           MEMS Components
           LCD
           high-density interconnect PCB
           IC Package
           Micro Mechanical Parts
       and analysis and surface research of other materials and Precision Machined Surface.

 

Features:

  1. Customer-Fitted Flexible Hardware Design
  1. High-Speed Scanning and Pre-processing
  1. Professional Graphic Analysis Software

 
Specifications:

Model

SWIM 1510MS

Configuration

Microscope, Scanning controller, Stage, Imaging unit, Computer

Microscope body

Mono microscope (standard)

Interference objectives
(optional)

Magnification

FOV (mm)

Optical resolution (mm)

10X

1

1.12

20X

0.5

0.84

50X

0.2

0.61

Vertical scanning controller

Scanning range

100 mm ( 400 mm, optional)

Scanning resolution

0.1 nm

Scanning mode

Automatic

Light intensity adjustment

Automatic / Manual

Sample Stage

X-Y stage

150 mm x 100 mm, manual (standard) with linear scale (1 mm )

X-Y position counter

Linear scale exchanger with USB interface

Z stage

80 mm , manual (standard)

Tilt stage

Manual

Imaging unit

Image sensor

Area CCD (standard)

Sensor resolution

640 x 480 pixels (standard)

Computer

Pentium-computer, 17” LCD Monitor, 200 GB Hard disk driver

Analysis Software

MS-Windows compatible data acquisition and analysis software, including: ISO roughness/step-height analysis, FFT and filtering, various 2Dand 3D views, profile analysis, zooming, conversion to standard image formats, etc.