| 90° slide-looking rectangular mirror type |
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Optical axis can be bent 90 degrees.
Effective when there is no space above the object.
Monitored image is a mirror image.
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| 90°slide-looking pent prism type |
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Monitored image is an electing image because of pent prism. |
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| Optical axis pitch conversion type |
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Narrow pitch marks between two points on a micro object can be recognized. |
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